Technical Specification:
| Code | Model | Bed Length | Bed Width | Bed Height | Center Distance | Swing | Flatness (µm) | Paralellness (µm) | Apply Center | Net Weight (kg) |
| 563-P1L | P-1 | 380mm | 81mm | 65mm | 150mm | 110mm | 5 | 5 | MT-1 | 14 |
| 563-P2L | P-2 | 420mm | 72mm | 200mm | 16 | |||||
| 563-P3L | P-3 | 530mm | 83mm | 90mm | 300mm | 20 |

